OPTICALLY TRAPPED MICROPROBE FOR NANO-PROFILE MEASUREMENT BASED ON INTERPOLATION METHOD OF STANDING WAVE SCALE USIGN CHROMATIC CONFOCAL SYSTEM |
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| Yasuhiro Takaya, Masaki Michihata, Shinichi Ueda |
- Abstract:
- The improved nano-profile measurement technique by scanning an optically trapped microprobe is proposed, which is used as a sensor to read a standing wave scale (SWS) based on the interpolation method. An axial position of the optically trapped microprobe was measured using a chromatic confocal system to interpolate the SWS with high accuracy and high resolution. The length and the resolution of the interpolated SWS (iSWS) could be achieved 2.1 µm and 20 nm, respectively. In order to verify the validity of the proposed microprobe technique, the surface profile measurement of a glass small lens with accuracy higher than 50 nm was demonstrated.
- Keywords:
- radiation pressure, microprobe, standing wave scale, chromatic confocal system, nano-profile
- Download:
- IMEKO-WC-2015-TC14-317.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015