CALIBRATION OF A WHITE-LIGHT INTERFEROMETER WITH A USE OF MATERIAL MEASURES RECOMMENDED BY ISO 25178 SERIES: RELIABILITY AND UNCERTAINTY

Marta Wiśniewska, Sabina Żebrowska-Łucyk
Abstract:
There is a discrepancy between rapid pace of introducing more and more sophisticated white-light interferometers and a tardy tempo of developing proper calibration procedures applicable to these machines. Therefore, the authors evaluated both repeatability and credibility of calibration results obtained with a use of PGR and PPT calibration standards recommended by ISO 25178 series. The outcomes of the research, as well as limitations of the calibration artefacts usefulness, are presented in the paper.
Keywords:
areal surface metrology, calibration, white-light interferometer
Download:
IMEKO-WC-2015-TC14-319.pdf
DOI:
-
Event details
Event name:
XXI IMEKO World Congress
Title:

Measurement in Research and Industry

Place:
Prague, CZECH REPUBLIC
Time:
30 August 2015 - 04 September 2015
 Back