NUMERICAL OPTIMIZATION OF IONIZATION GAUGE WITH CNT EMITTER |
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| Huzhong Zhang, Detian Li, Yongjun Cheng, Yongjun Wang, Lan Zhao, Zhenhua Xi, Jian Sun |
- Abstract:
- Electron stimulated desorption (ESD) and hot cathode effects are the key factors for extending the lower limit of ultra-high vacuum (UHV) measurement. Based on the ions optic simulation software Simion 3D 8.0, the mechanism of energy filter in axial-symmetric transmission (AT) gauge has been analysed. And the influence of potential distribution within anode grid on ions collection efficiency is studied, which also verified by the experiment. Then a new carbon nanotube based gauge with energy filter is constructed for eliminating hot cathode effects and ESD ions. To improve sensitivity and decrease ESD effect, electrodes structure (i.e. high voltage gate, energy suppressor etc.) and voltages are optimized by numerical simulation. The results show that suppressor could decrease the electric field penetration effect of high voltage gate. The cylindrical energy filter could decouple ESD ions from gas ions by means of energy differences between two kinds of ions.
- Keywords:
- ionization gauge, carbon nanotube emitter, electron stimulated desorption, sensitivity, simulation
- Download:
- IMEKO-WC-2015-TC16-343.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015