METROLOGICAL PERFORMANCE OF INTEGRATED MULTIPLE AXIS MEMS ACCELEROMETERS UNDER THERMAL EFFECT |
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| Tamara G. Nesterenko, Evgeniy S. Barbin, Aleksey N. Koleda, Alisa A. Arshinova |
- Abstract:
- Microelectromechanical system (MEMS) accelerometers are widely used for the measurement of acceleration, tilt, vibration, and shock in moving objects. MEMS-based accelerometers are rather sensitive to the temperature changes. The paper presents the dependence between the temperature changes and metrological performance of MEMS-based accelerometer. Methods of the temperature compensation are considered in this paper.
- Keywords:
- MEMS-based accelerometer, thermal errors, moving mass, temperature sensitivity, elastic suspension
- Download:
- IMEKO-WC-2015-TC22-435.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015