DIFFUSION VIALS FOR LOW AND ACCURATE RELEASE OF KEY-VOC IN ATMOSPHERIC CHEMISTRY AND CLEAN ROOM INDUSTRIES |
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| Alessia Demichelis, Guido Sassi, Maria Paola Sassi |
- Abstract:
- Accurate VOC mixtures at ppb level are needed both for the atmospheric monitoring both for the clean room industries. Research is developing a compact diffusion generator of trace mixtures to be installed on-site. To assure the required accuracy, vials with a low and calibrated diffusion rate DR are necessary. In this paper glass vials were realized, the uncertainty budget of DR was evaluated and experimentally validated. A DR accuracy better than 3% at 200 ng/min release rate was obtained.
- Keywords:
- Key-VOC, AMCs, reference gas mixtures, diffusion rate, uncertainty
- Download:
- IMEKO-WC-2015-TC24-459.pdf
- DOI:
- -
- Event details
- Event name:
- XXI IMEKO World Congress
- Title:
Measurement in Research and Industry
- Place:
- Prague, CZECH REPUBLIC
- Time:
- 30 August 2015 - 04 September 2015