The control system of primary oscillation for micromechanical gyroscope

Pavel Baranov, Tamara Nesterenko, Edvard Tsimbalist, Evgenij Barbin, Aleksej Koleda, Sergej Vtorushin
Abstract:
The mode of primary oscillations of micromechanical gyroscopes sensor is provided by the electrostatic comb-drive actuator in which the interaction between the micromechanical structures and electronics occurs by means of a single or differential capacitive sensors. The paper presents a new approach to the primary oscillation control system of the two-component micromechanical gyroscope. The method of calculating natural resonant frequency is based on measurements of the total current passing through the comb-driver actuator capacitances and the lock-in detection is suggested.
Download:
IMEKO-TC10-2016-021.pdf
DOI:
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Event details
IMEKO TC:
TC10
Event name:
TC10 Workshop on Technical Diagnostics 2016
Title:

14th IMEKO TC10 Workshop “New Perspectives in Measurements, Tools and Techniques for system’s reliability, maintainability and safety”

Place:
Milano, ITALY
Time:
27 June 2016 - 28 June 2016