Pico-Meter Metrology for the Primary Vibration Calibration |
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| Wan-Sup Cheung, Kyungmin Baik |
- Abstract:
- This paper introduces the use of a homodyne differential plane mirror interferometer (HDPMI) for development of the primary vibration calibration system. The zero-drift test results showed that it enables displacement measurement in a scale of 10 pico-meters could be feasible. The HDPMI model was shown to be quite successful for the primary vibration calibration even in the frequency range of 5 kHz to 20 kHz. The standard uncertainty of the complex sensitivities from 5 kHz to 20 kHz was to be less than 0.46 % for their moduli and 0.57° for the phase shifts.
- Keywords:
- vibration, primary calibration, laser interferometer, pico-meter metrology
- Download:
- IMEKO-TC22-2017-005.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC22
- Event name:
- TC22 Conference 2017 - Measurement facing new challenges!
- Title:
4th Conference on Vibration Measurement (together with 23rd TC3 Conference on the Measurement of Force, Mass and Torque and 13th TC5 Conference on the Measurement of Hardness)
- Place:
- Helsinki, FINLAND
- Time:
- 30 May 2017 - 01 June 2017