Analysys and Protocol for Characterizing Intrinsic Properties of Three-Axis Mems Accelerometers Using a Gimbal Rotated in The Gravitational Field

Michael Gaitan, Muhammad Yaqub Afridi, Jon Geist
Abstract:
Three-axis MEMS accelerometers are typically characterized in terms of their cross-sensitivity matrix. We present an analysis and protocol to characterize them in terms of their intrinsic properties, which we define as the responsivity of each accelerometer along its axis of maximum response in a gravitational field and the angles between each of these axes. An analysis and test protocol is developed to determine these properties using a gimbal to rotate each axis of the device orthogonally to the gravitational field. We propose that this approach is better suited for laboratory inter-comparisons.
Keywords:
MEMS, microelectromechanical systems, accelerometer, intrinsic, calibration
Download:
IMEKO-TC22-2017-015.pdf
DOI:
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Event details
IMEKO TC:
TC22
Event name:
TC22 Conference 2017 - Measurement facing new challenges!
Title:

4th Conference on Vibration Measurement (together with 23rd TC3 Conference on the Measurement of Force, Mass and Torque and 13th TC5 Conference on the Measurement of Hardness)

Place:
Helsinki, FINLAND
Time:
30 May 2017 - 01 June 2017