Assessment of the Mems Accelerometer Calibration by Using the Very Low Frequency Primary Vibration Calibration System with Wireless Transmission |
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| Sheng-Han, Wang, Kuang-I, Chang, Yu-Chung Huang |
- Abstract:
- The very low frequency primary vibration calibration system in Taiwan has been improved. In order to provide local semiconductor foundry a more reliable way to calibrate the MEMS accelerometer, three kinds of accelerometers that are ADXL, PCB 356A15 and QA3000 were tested via such vibration calibration system. Unlike PCB 356A15 and QA3000, the MEMS type accelerometer, ADXL, was only performed well under 100 Hz. All the three kinds of accelerometers were connected to NI wireless modules in order to reduce the inconvenience of wires during vibration monitoring. The result suggests that we shall use MEMS accelerometer with the vibration under 100 Hz.
- Keywords:
- primary vibration calibration, MEMS accelerometer, accelerometer wireless
- Download:
- IMEKO-TC22-2017-018.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC22
- Event name:
- TC22 Conference 2017 - Measurement facing new challenges!
- Title:
4th Conference on Vibration Measurement (together with 23rd TC3 Conference on the Measurement of Force, Mass and Torque and 13th TC5 Conference on the Measurement of Hardness)
- Place:
- Helsinki, FINLAND
- Time:
- 30 May 2017 - 01 June 2017