AUTOMATIC EXECUTION OF INSPECTION PLANS FOR KNOWLEDGE-BASED DIMENSIONAL MEASUREMENTS OF MICRO- AND NANOSTRUCTURED COMPONENTS |
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| Gerhard Linss, Susanne C N Töpfer, Uwe Nehse |
- Abstract:
- Due to the fast advancement of manufacturing technologies for micro- and nanostructured components the need for sophisticated inspection methods increases. The paper on hand discusses the prerequisites for automatic execution of inspection plans. Main goal is to enable automated dimensional measurements of micro- and nanostructured components instead of executing functional tests. Besides reducing manufacturing cost this approach enables the setup of a closed quality loop which allows a higher level of efficiency. It provides a constant feedback to the manufacturing processes and to the design process. Based on the latest state-of-the-art the setup and operating principle of a closed quality loop for dimensional inspections is described. Vital part of the closed quality loop is a multisensor system consisting of adaptive, intelligent sensors with cascaded measuring ranges. The paper provides a novel and consistent overall view of dimensional inspections of micro- and nanostructured components and how they will be executed in the future. This paper shall deliver a significant contribution to the birth of industrial nanometrology which must overcome the limitations of research oriented nanometrology.
- Keywords:
- inspection planning, micro- and nanometrology, dimensional measurements, multisensor measurements
- Download:
- PWC-2006-TC7-021u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006