HYBRID TYPE SURFACE THERMOMETER |
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| Tohru Iuchi, Kensuke Hiraka |
- Abstract:
- A hybrid-type surface thermometer combines the contact and non-contact methods, which allows us to overcome the shortcomings of both methods. The hybridtype surface thermometer is a modified radiation thermometer. Temperature measurement using this thermometer is possible within a random error of ±0.5 K at temperatures of around 1000 K. This thermometer provides a useful means for calibration of in-situ temperature measurement in various processes, especially in the semiconductor industry. This paper introduces the basic idea of the hybrid-type surface thermometer, presents experimental results and discussions, and finally describes an application.
- Keywords:
- radiation thermometry, thermal contact resistance, metal film, emissivity, semiconductor wafer
- Download:
- PWC-2006-TC12-007u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006