PIEZORESITIVE DIAMOND-LIKE CARBON MICRO STRAIN GAUGES |
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| Erwin Peiner, Arti Tibrewala, Holger Lüthje, Ralf Bandorf, Saskia Biehl, Lutz Doering |
- Abstract:
- Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon bossmembrane force sensors. DLC strain gauges were investigated under vertical and horizontal connection as well as longitudinal and transversal orientation at temperatures between RT and 60°C revealing piezoresistive gauge factors typically in the range of 50-90 (a-C:H) and 20-30 (a-C).
- Keywords:
- Diamond-like carbon (DLC), piezoresistive gauge factor, micromachined boss membrane sensor
- Download:
- PWC-2006-TC13-010u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006