METROLOGICAL CHARACTERIZATION OF DIGITAL MEMS ACCELEROMETERS IN DYNAMIC CONDITIONS: AN INVESTIGATION OF LINEARITY IN AMPLITUDE AND TEMPERATURE EFFECTS |
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| A. Schiavi, A. Prato, F. Mazzoleni, A. Facello, A. Kwitonda |
- Abstract:
- In several applications, such as industrial plants monitoring, or peculiar manufacturing process, the sensors are subjected to a wide range of acceleration amplitude levels or shocks, as well as thermal changes, that could affect the micro electro-mechanical inner parts, altering their performance and reliability. In this work, by applying a calibration procedure developed at INRIM, the main sensitivity of digital MEMS accelerometers is evaluated, as a function of amplitude, in the frequency domain. Moreover, a survey of temperature drift, from -20 °C up to 80 °C, is also performed, to characterize the suitability of digital MEMS accelerometers for actual applications.
- Keywords:
- digital MEMS accelerometer; calibration; amplitude; thermal effects
- Download:
- IMEKO-TC22-2022-033.pdf
- DOI:
- 10.21014/tc22-2022.033
- Event details
- IMEKO TC:
- TC22
- Event name:
- TC22 Conference 2022
- Title:
5th TC22 Conference on Vibration Measurement (together with the 24th TC3 Conference on the Measurement of Force, Mass and Torque, the 14th TC5 Conference on the Measurement of Hardness, and the 6th TC16 Conference on Pressure and Vacuum Measurement)
- Place:
- Cavtat-Dubrovnik, CROATIA
- Time:
- 11 October 2022 - 13 October 2022