MINUTE FORM MEASURING SYSTEM

Kazuhiro Ishizu, Akihito Takahashi, Tomoyuki Miyazaki, Kentaro Nemoto
Abstract:
According to the progress of industrial products, high-accuracy and minute parts are increasing rapidly. As one of the desired measuring systems for accurately and efficiently evaluating the 3D form of these mass-production minute form parts, an evaluation system constructed by combining "a high-accuracy stage", "minute probes" and "an optical unit" is described.
Keywords:
Measuring instrument, Minute form measurement, Probe, Low measuring force
Download:
PWC-2006-TC14-027u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006