DESIGN AND FABRICATION OF NANOMETRIC LATERAL SCALE CONSISTING OF GaAs/InGaP SUPERLATTICE
Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji
Abstract:
Nanometric lateral scales with 25 nm pitch using GaAs/InGaP superlattice were designed and fabricated for realization of the-smallest-pitch-CRMs. The pitch of the scales was measured by a nanometrological AFM and uncertainty in pitch measurements was evaluated. The quality of the developed scales as CRMs was verified.
Keywords:
nanometrology, pitch, CRM
Download:
PWC-2006-TC14-031u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006
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