CONSTRUCTION AND EVALUATION OF A TRACEABLE METROLOGICAL LONG RANGE SCANNING TUNNELING MICROSCOPE
Albert Weckenmann, Jörg Hoffmann
Abstract:
Based on a commercial laser interferometrically controlled long-range nanopositioning unit a traceable metrological STM with a range of 25 mm · 25 mm · 5 mm and a resolution up to 0.1 nm has been designed, set-up and tested. Design objectives of the custom made STM probing system were low noise and high thermal and mechanical stability to enable for time consuming large area scans.
As the nanopositioning stage is capable of traceable position measurement the probing system is used in compensation method, i.e. minimizing the effective measuring range of the sensor so that the length measured untraceably by the sensor is negligible compared to the lengths measured traceably by the interferometers.
Keywords:
STM, coordinate metrology, multisensorics, nano technology
Download:
PWC-2006-TC14-033u.pdf
DOI:
-
Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006
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