MODULARIZED MODELING OF MEASUREMENT PROCESSES IN MICRO- AND NANOMETROLOGY FOR MEASUREMENT UNCERTAINTY EVALUATION
Albert Weckenmann, Thomas Wiedenhoefer
Abstract:
Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.
Keywords:
metrology, uncertainty, modeling
Download:
PWC-2006-TC14-035u.pdf
DOI:
-
Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006
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