A NEW VECTORIAL MODEL FOR THE ESTIMATION OF UNCERTAINTY IN NANO COORDINATE
R. Füßl, G. Jäger, R. Grünwald, I. Schmidt
Abstract:
Nano coordinate measuring machines (NCMMs) are technological devices enabling the positioning, touching and measuring of centimetre-sized objects with nanometre precision. When using such measuring machines the specification of measurement results requires the expression of uncertainty of measurement. This paper describes a concept for the expression of three- dimensional uncertainty of NCMMs based on a vectorial metrological model. By means of a modular model approach submodels can be easily included in the metrological main model. Furthermore, cross-coupling effects arising between the measuring axes can be taken into account. The described model provides a basis for the expression of uncertainty according to the Guide to the Expression of Uncertainty in Measurement (GUM) or by means of the Monte- Carlo-Method. The results of the uncertainty analysis are shown for a special example of a vectorial model.
Keywords:
Nanometrology, uncertainty of nano coordinate measuring machines, vectorial metrological model
Download:
PWC-2006-TC14-034u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006
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