INVESTIGATION OF DYMANIC PROPERTIES OF LINE SCALE CALIBRATION SYSTEMS

Saulius Kaušinis, Aurimas Jakštas, Rimantas Barauskas, Albinas Kasparaitis
Abstract:
The paper addresses the error-related problems specific to line scale calibration in dynamic mode of operation that are caused primarily by geometrical and thermal deviations of the calibration system components. A new 3D finite element model has been developed in order to both investigate thermo-mechanical processes in the comparator structure and evaluate possible temperature influence on geometrical dimensions of the line scale. An interferometer-controlled comparator setup with a moving microscope has been designed to evaluate the performance of the long scale calibration process.
Keywords:
line scale calibration, FE modelling
Download:
PWC-2006-TC14-045u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006