Makoto Abe, Hiroyuki Fujimoto, Osamu Sato, Katsutoshi Sato, Toshiyuki Takatsuji
Dimensional X-ray CT has attracted production industry due to its nature enabling not only external dimensional measurement but also internal dimensional measurement which has been difficult for pre-existing dimensional measurement instruments. However, because the reconstruction process of three dimensional volume image may be affected by various kinds of error sources of the hardware and also the software, performance evaluation of dimensional X-ray CT has become one of the major issues, especially for X-ray CT system with higher energy such as several MeV. Resolution performance of high...
TC14 LMPMI Symposium 2014
· TC14
· 2014
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Kuang-Chao Fan, Hung-Yu Wang, Shih-Hsin Hsu, Li-Min Chen
With the continuing trend toward device miniaturization in many engineering and scientific fields, the need to accomplish highly-precise measurements at the micro- or nano scale has emerged as a critical concern. In practice, the accuracy of high-precision machines is affected by the Abbe principle due to inevitable angular errors during motion. Therefore, this study focuses on the development of a high precision nanometer level co-planar XY stage with miniature multi-degree-of-freedom measurement system (MDFMS). The symmetric structural design of the co-planar stage is considered to...
TC14 LMPMI Symposium 2014
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Satoru Maruyama, Kazuhisa Fusayasu
Recently, higher accurate and large size Coordinate Measuring Machine (CMM) is required in industry (especially aerospace and energy field). In case of large size CMM, very long gauge blocks or step gauge need for its acceptance test and calibration. However, the high accurate manufacturing of long size gauge blocks is very hard. Then tester used normal size of gauge blocks using stitching method in order to cover its long range of CMM. International rule of CMM acceptance test “ISO 10360-2:2009” accepts to use laser interferometer calibrated with an iodine-stabilized He-Ne laser and its...
TC14 LMPMI Symposium 2014
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Fazil Syed, Faheem Mohammad, Luai M. Al-Hadhrami
Non-destructive testing (NDT) describes a wide range of methods for measuring and comparing physical quantities against a nominal condition. The most familiar laser based optical non destructive methods are based on the interference of wave fronts of monochromatic light reflected from a test surface. This paper will focus primarily on the profound review of operating principles of laser based non destructive methods involved with the measurement principles at Measurement Standards Laboratory (MSL). Michelson Inteferometric Principles with emphasis on minimizing alignment errors for better...
TC14 LMPMI Symposium 2014
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Qinghua Wang, Hiroshi Tsuda, Satoshi Kishimoto, Yoshihisa Tanaka, Yutaka Kagawa
Three Moiré techniques based on a laser scanning microscope (LSM) were presented and compared for the first time, including the LSM scanning moiré method, our developed LSM overlapping moiré method, and our newly developed LSM secondary moiré method. The formation principles of these moiré patterns and the measurement principles for deformation measurement were introduced. The applicable conditions of these three techniques were analyzed. Some typical moiré fringes on a strain gauge, carbon fiber reinforce plastics, a polyimide film and a silicon wafer were illustrated. Our developed LSM...
TC14 LMPMI Symposium 2014
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Ji Qi, Yingzhong Tian, Wenjun Zhang, Albert Weckenmann, Minglun Fang
Optical microscopy enables the observation of highly magnified objects and material structures on micro surfaces, however with the weakness that it can only acquire 2D images. In order to observe the areal features more accurately and intuitively, 3D surface micro topography recovery is applied to form a 3D surface model of an object from its 2D image sequence. Optical microscope has a limited depth of focus in large magnification, which makes the area within the depth of focus cleared and other area blurred. So this paper firstly acquires image sequence which obtains all useful information...
TC14 LMPMI Symposium 2014
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Lao Dabao, Zhou Weihu, Li Wanghong, Shi Dong
On high precision one-dimension turntable, an angle measuring system was built with the cylindrical grating and uniform multi-reading head. Based on high precision multi-mirror polyhedron with autocollimator, angle measurement error was obtained. Then, the angle measuring error was analyzed by FFT, the compensation mechanism of multi- reading head was analyzed in detail. Each order of the angle error was compensated by using the harmonic analysis method, and sources of angle error were exposed. The experimental results show that the multi-reading head cylinder grating sensor angle measuring...
TC14 LMPMI Symposium 2014
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Tsukasa Watanabe, Yohan Kondo, Hiroyuki Fujimoto
SelfA (Self-calibratable Angle device) encoder is an epoch-making encoder with the angular error self-calibration function. SelfA encoder, which has the structure of arranged several sensor heads around the scale disc at the equal angular interval space, by analyzing the angle signal from each sensor heads output in one revolution, can detect several angular error factors, not only angle scale error but an attachment error (eccentricity error). Because SelfA can carry out this self-calibration analysis after attached to the axis shaft of the apparatus, even if measurement condition changes,...
TC14 LMPMI Symposium 2014
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Jia Luo, Jian Bai,Yao Jiang, Fan He, Kaiwei Wang, Xiyun Hou, Changlun Hou
A novel method for accurate long focal-length measurements, based on stripe matching, is proposed. This method consists of a laser source, two gratings and a detector. A divergent beam illuminating two parallel gratings produces moiré fringes on the second grating. Then, added a test lens in front of the first grating, a new moiré fringes is produced. The two moiré fringes are matched by moving the second grating and the corresponding focal-length can be easily obtained by the measurement of the distance between gratings. Experiment demonstrates the proposed method features high accuracy of...
TC14 LMPMI Symposium 2014
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Myun-Sik Kim, Jonathan Sunarjo, Lisa Allegre, Reinhard Voelkel
We present various metrology techniques for small-size microlenses, which can be applied to a single lens or thousands of microlenses. An individual microlens can be characterized by its optical performance and surface profile characteristics. First, the optical performance is characterized by using a high-resolution interference microscope (HRIM), which consists of Mach-Zehnder interferometer and an optical microscope. Second, a confocal microscope is applied to investigate the surface profile parameters. Third, the three-dimensional (3D) intensity distribution near the focus can be...
TC14 LMPMI Symposium 2014
· TC14
· 2014
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