DETERMINATION OF THE POWER SPECTRAL DENSITY IN CAPACITIVE DIGITAL ACCELEROMETERS USING THEORY OF LIMIT CYCLES

Martin Kollár, Linus Michaeli
Abstract:
Mechanical noise due to Brownian motion, electronic noise introduced by the interface circuit due to thermal noise sources in the electronic devices and quantisation noise due to the analog to digital conversion process are the main three noise sources presented in a sigma-delta modulator (ΣΔM) type system applied to a micromachined accelerometer: Based on theory of limit cycles in nonlinear closed loop systems, the mathematical model and formulae for power spectral density calculation of a micromachined accelerometer will be derived in the paper. The theoretical considerations will be verified with the simulation results in MatlabSIMULINK.
Keywords:
delta modulator (ΣΔM), capacitive accelerometer, power spectral density
Download:
PWC-2006-TC3-006u.pdf
DOI:
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Event details
Event name:
XVIII IMEKO World Congress
Title:

Metrology for a Sustainable Development

Place:
Rio de Janeiro, BRAZIL
Time:
17 September 2006 - 22 September 2006