Recent situation on global metrology is reviewed from the view point of requirements of science and technology. Basic infrastructure on quantities and units is built up under the international recognition and rules in science of measurement. Metrological traceability to a metrological reference such as a measurement unit, a reference procedure, and a reference material is considered to be fundamentals in calibration and measurement. In order to confirm the reliability of a measurement result, statement of metrological traceability chain together with attributed measurement uncertainty is required for calibration and testing laboratories. Concepts and definitions of terms are documented in such as SI brochure, VIM, GUM and some other standard documents of ISO, IEC, OIML and ILAC. In Mutual Recognition Arrangement (MRA) such as CIPM and ILAC, statements of competence for both quality management system and technology based on ISO/IEC 17025 are required. Detailed description on metrological traceability and measurement uncertainty for a measurement result is also required in many fields of science, industry and our social life from the safety point of view.

A compact dot marker using a cw laser on a microcrystalline silicon (µc-Si:H) thin film is demonstrated. Annealing process using a laser leads to a continuous crystallization from nano to sub-micron domain (> 50 nm) of Si nanocrystals within the thin film. This patterning is quite useful because we can manipulate 2-D process of silicon structural forms for an efficient thin-film transistor (TFT) devices with respect to uniform electron mobility. A Raman microscope is quite useful to reveal a crystal volume fraction with a calculation from the population ratio between crystalline and amorphous phase.

The necessity for the synthesis of nanomaterials (NMs) with well-controlled physicochemical properties is emerging with the development of nanoindustry and advanced applications of nanomaterials in biomedical fields. In this study, we observed time evolution of physicochemical properties of silica nanoparticles (SiO2 NPs) as candidates of certified reference materials (CRM) for size analysis. We have validated the size stability of spherical SiO₂ NPs exhibiting diameters of 30 and 40 nm in diameter for one year.

Capacitive type MEMS microphone was designed, fabricated and characterized. Finite element model was used in the design process of the MEMS microphone and the fabrication was carried out using MEMS fabrication process including low stress silicon nitride membrane deposition and eutectic bonding process. The simulation results show that the designed MEMS microphone has the resonant frequency above the operation frequency range and the sensitivity of 9.1 mV/Pa (@18V). The experimental results show that the MEMS microphone has 3 dB cut-off frequency of 144 kHz.

The competitive machining industry requires modern milling tools and their flexible, high quality and powerful industrial implementations. The main factors effecting the operational quality of the end milling tools are tool material, coating and edge geometry. This study represents the assessment of the coating and the surface characteristics of the end milling tools by contact (stylus profilograph) and non-contact mode nanometrological devices (digital microscope, 3D laser scanner) to establish a methodology to assess the micro/nanogeometry of the coated and uncoated tools with an effort to predict the surface roughness effect. This approach introduces a wide application of knowledge extraction to supervise the end milling operation by ensuring the operational quality of the tools where high accuracy and good quality surface is demanded.