The sensor for the measurements of a dynamic pressure was developed and evaluated. Quartz was adopted as a piezoelectric medium to transmit a pressure signal and a sensor was made from SM45C. Positive going step method was used to evaluate sensors. The developed sensor showed a linear response property till 300 MPa and a repeatability error below ± 3 %. The sensor showed a similar sensitivity and a poor repeatability compared to commercial pressures. But we expected our sensor had a competitiveness considering the production cost and the repeatability could be improved if the packaging technique might be improved.

A deformation of a diaphragm inside a differential type capacitance diaphragm gauge is investigated as a function of the differential pressure applied to the gauge. Below its full scale of 133 Pa, the volume change of the gauge is proportional to the applied pressure as predicted by the elastic theory. The volume change rate of the gauge is calculated to be 0.00012 ml/Pa at a line pressure of atmosphere pressure of about 100 kPa. When the pressure is more than its full scale, the response of the diaphragm volume change is linear to the applied pressure until 500 Pa. The response is changed to one-third power of the applied differential pressure as predicted by the membrane theory above 500 Pa until 3000 Pa.

Multi-opening orifice is a device for gas flow and related vacuum quantities primary measurement. It keeps molecular flow regime and thus possibility to calculate the conductance very accurately from geometrical dimensions up to relatively high pressure. Moreover, the value of the total conductance could be sufficiently high to achieve reasonable parameters of the used vacuum system. Suitable shape of a multi-opening orifice duct and principles of multiopening orifice design are discussed. An example of the multi-opening orifice manufactured with grinding is given. Limits and requirements for further development are drafted.

The effects of the calibration procedure on the results are investigated for quartz Bourdon-type hydraulic pressure transducers. A fully-automated system that uses a pressure balance as the standard device has been developed for the calibrations at pressures from 10 MPa to 100 MPa. The effect of the interval between the calibration cycles and the effect of preliminary pressurization are quantitatively evaluated for two kinds of calibration cycles, stepwise and 0-A-0-type calibration cycles. For the stepwise cycle, the interval between the calibration cycles strongly affects the results in the pressure increasing process. The preliminary pressurization reduces the influence of the interval on the results. However, in turn, the waiting time between the preliminary pressurization and the main calibration cycle exerts a strong influence on the results. For the 0-A-0-type calibration cycle, the effect of the interval on the results is almost half of that for the stepwise cycle. Moreover, with preliminary pressurization, the calibration results are rarely affected by the interval. From the results, possible methods for obtaining reproducible calibration results are discussed.

Flows of a gas through piston-cylinder gap of a gas-operated pressure balance and in general vacuum system have one similar aspect, i.e., the gas is rarefied due to small passage and low pressure, respectively. The flows in both systems could characterize in either slip flow regime or transition regime. Therefore, fundamental researches of flow in these regimes are useful for both pressure and vacuum metrology, especially for the gas-operated pressure balance where continuum viscous flow model is widely used for determining an effective area of pressure balance. The consideration of gas flow using suitable assumption would improve the accuracy of such calculation. Moreover, knowledge in rarefied gas flow contributes a predictability of gas behaviors in vacuum and low-flow leak detection system. This paper provides useful information of rarefied gas flow in both slip flow and transition regimes.