Experimental results of intelligent adaptive detection made with spectral sensors are presented. Firstly for a commercial detector array spectrometer the single entrance slit is replaced by a slit array. Differently patterned one-dimensional arrays are used. There are switched and fixed versions of arrays. An improvement of the detected signal and the signal-to-noise-ratio by the factor 10 has been achieved. Secondly the measured noisy signal is compared with known expected signals. Weak signals can be detected with an high probability and thus an increased sensitivity.

We apply optical coherence tomography (OCT) and a modification thereof, namely polarisationsensitive OCT (PS-OCT), to a variety of problems posed in metrology for material analysis and diagnostics. Among these are imaging of glass-fibre enforced epoxy resin compounds and the detection of dry spots. Furthermore, PS-OCT measurements have been used to measure the birefringence and the orientation of the fast optical axis within test structures: mapping of strain fields of samples under uni-axial and non-uniform external stress and the detection of flow patterns in injection-moulded plastic parts could be successfully demonstrated.

Althought the surveying instruments grow ever more complex, yet the telescope remains the basic part of modern-day surveying instruments. When considering the problem of measuring with a surveying instrument, that is with the telescope, it is necessary to consider the issue as a whole. In other words it is necessary, alongside the function of the telescope, to take into consideration the object to be measured, atmosphere as the medium transmitting light and physiological and psychological attributes of the sighter. In order to define a complex optical system that would facilitate prediction of measurement's accuracy with the telescope, in dependence on atmosphere conditions, namely different temperature and preassure, it is necessery to provide a description of the atmosphere and telescope as independet optical systems. This is accomplished throught modulation transfer function that provides a complete description of the properties of a considered optical system. Starting with the fact that surveyors prior to their departure to outdoor measurings have at their disposal only the information on air temperature and pressure, we have conducted suitable theoretical study of the problem. The results of this study provide means to evaluate the limitations of resolution of a considered optical system imposed by the atmospher based on the knowledge of available meteorological parameters.

Accurate measurements of MEMS surfaces, geometries and motions are crucial to achieving the desired performance of the devices. The wide variety of MEMS devices in development and production requires very flexible metrology for single-platform characterization. In addition to having greatly varying geometries, devices must also be characterized statically and under actuation. White-light interferometry, fortunately, is a technique flexible and accurate enough to meet MEMS metrology needs. This high-speed, non-contact measurement method allows both large lateral and vertical ranges with nanometer-level vertical resolution and positional accuracy. When standard illumination is complemented with strobed light, dynamic measurements of MEMS can also be carried out. This paper presents some of the hardware and software design considerations for producing a single metrology platform with the required flexibility for production MEMS metrology. Several static and dynamic MEMS measurements are presented to illustrate the design requirements.

In this paper a parametric model of the uncertainty of digital images in industrial contest is presented and characterized. The functional dependency of the model parameters from the operating conditions and the image characteristics are theoretically established and experimentally verified.