Wang Jintao, Liu Ziyong, Xu Changhong, Li Zhanhong
Measurement on Compressibility Coefficient for Density Standard Liquid at 2329 kg/m3
The accurate measurement on the compressibility coefficient of density standard liquid at 2329kg/m3 (DSL-2329) plays an important role in the quality control for silicon single crystal manufacturing. A new method is developed based on hydrostatic suspension principle in order to determine the coefficient with high measurement accuracy. Two silicon single crystal samples with known density are immersed into a sealed vessel full of DSL-2329. The density of liquid is adjusted with varying liquid temperature and static pressure, so that the hydrostatic suspension of two silicon single crystal samples is achieved. The compression coefficient then calculated by using the data of temperature and static pressure at the suspension state. One silicon single crystal sample can be suspended at different state, as long as the liquid temperature and static pressure function linearly according to a certain mathematical relationship. By using the method based on hydrostatic suspension principle, the compressibility coefficient can be measured at the same time, and measurement precision can be improved due to avoiding the influence of liquid surface tension. This method was further validated experimentally, where the mixture of 1, 2, 3- tribromopropane and 1,2-dibromoethane is used as DSL-2329. The compressibility coefficient was measured, as 5.4 × 10–10 Pa–1.