Min-Seok Kim, Jin-Seok Jang, Yon-Kyu Park, Han-Wook Song
A FLEXIBLE THREE-AXIAL FORCE MEASURING ARRAY FOR TACTILE SENSING APPLICATIONS
We report a high-performance flexible tactile sensor capable of measuring 3-axial forces, which consists of an array with a size of 8 × 8 integrated in an area of 10 mm². Each cell has four strain gauges to detect 3-axial forces. The strain gauge is made of an inorganic silicon membrane. We fabricated the tactile sensor through a combination of a conventional batch micromachining process and a dry-transfer-printing technique. The fabricated tactile sensor showed a repeatable error less than 1 %, a minimum detectable force better than 0.5 g and a minimal crosstalk among 3-axial forces.