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Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya
MEASUREMENT OF PATTERNED WAFER SURFACE DEFECTS USING ANNULAR EVANESCENT LIGHT ILLUMINATION METHOD

To detect particulate defects on patterned wafers of below 100 nm design rule, we proposed a new detection method using evanescent light illumination. To verify the feasibility of the method, we performed fundamental experiments. The results show that particle with a size of 170 nm on the patterned wafer surface with about 400 nm pitch is detected.

Salvador Echeverría-Villagómez, Mahdha Flores-Campos, Rita Pantoja-Lesso, Nadira Rodríguez-Damián, Benito Valgañón-Argueta
HUMAN RESOURCE AND KNOWLEDGE MANAGEMENT SYSTEM FOR COMPETENCES IN METROLOGY USING INFORMATION TECHNOLOGIES

This article presents a proposal for the development of a Knowledge management system for the management of Metrologic knowledge. It was conceived to solve the problematic detected at some metrological organizations in México. It shows the revision of some information about HR problems, Knowledge management and Technology of education tendencies. The system is under development in the time this paper was written, however it is considered pertinent to present this information as a strategy that could be adopted by any organization concerned with metrology and on the other hand it expected to be improved with the comments of other NMIs (National Measurement Institutes) experiences.

Queenie Siu Hang Chui, Jaim Lichtig
ASSESSING UNCERTAINTIES RELATED TO LINEAR CALIBRATION CURVES: A CASE STUDY FOR FLAME ATOMIC ABSORPTION SPECTROMETRY

Least square linear regression is widely used in analytical chemistry. In practice a linear relationship between substance content and measured value still has been assumed based on the correlation coefficient criterion, although not recommended. Textbooks provide the necessary formulas for the fitting process, based on the assumption that there is no error in the independent variable. In practice the ordinary least squares (OLS) textbook procedure is used even when the previously stated assumptions are not strictly fulfilled. In this paper, how to validate the calibration function is dealt with in detail using as an example based on measurements obtained for cadmium determination by flame atomic absorption spectrophotometry (FAAS). Assessing uncertainties related to linear calibration curves is also discussed. Considering uncertainties of weights and volumetric equipment and instrumental analytical signal it is observed that the most important factor that contributes to the final uncertainty is the uncertainty of the calibration function.

Dilhermando Augusto de Mello, Luciana A. Almeida Carvalho
"IT IS NOT FORBIDDEN TO DREAM… NOR TO COUNT TALES" METROLOGY EDUCATION FOR THE YOUTH

XVIII IMEKO World Congress presents the paper METROLOGY EDUCATION FOR THE YOUTH. The work addresses among one forms playful to present the metrology fundamentals and the main scientists who contributed with their discoveries, research and measurements, throughout the evolution of the human being and the technology.

E.C.C. Farias, V.Y. Aibe, S.B. Araujo
PEDAGOGICAL EXPERIENCE WITH HYDROSTATIC WEIGHING SYSTEM

This project investigates the performance of two assemblings of hydrostatic weighing system. Low uncertainty of 0.004% to measure solid volume and 0.007% to measure liquid density was achieved with relatively simple measurements. An error analysis was made and the method could be used in calibration laboratories as well as for education on calibration procedures.

André Roberto de Sousa, Ricardo Gonzáles, Sérgio Conejero
FORMA3D – AN EDUCATIONAL PROGRAM FOR THE QUALIFICATION OF TECHNICAL PERSON INVOLVED WITH COORDINATE METROLOGY IN BRAZIL

The fast dissemination of coordinate metrology in Brazil has not been followed by the necessary qualification of human resources. Because of its flexibility, complexity and great integration with the whole manufacturing system, Coordinate metrology demands an in depth qualification of the technical person. This paper describes an educational program developed by professionals from Universities and Industries in Brazil for the qualification of technical person involved with coordinate metrology. The program, called FORMA3D, has been active since 2004 with more than 100 3D Metrologists graduated. The motivations, the technical background, the pedagogical structure and the preliminary results are related in this paper.

Tomáš Sysala, Petr Dostál, Milan Adámek
MONITORING, MEASURING AND CONTROL SYSTEMS FOR REAL EQUIPMENT CONTROLLED BY PLC IN EDUCATION

This paper is focused on education in the field Measurement and control of technological processes. In one part of this sphere students obtain theoretical knowledge in an application of commercial systems for measurement, visualisation and control of technological processes. The system is control and data are measured via a programmable controller (PLC) and as the superior systems the system InTouch, Wizcon and ContolWeb2000 were used. All systems were tested on the real equipment. The programmable controller controls the system and at the same time is a data source for master applications that are designed for the systems InTouch, Wizcon and ContolWeb2000.

M. Alvarez Prieto, J. Jiménez Chacón, I. Cortés Nodarse, N. Martínez Alfonso
SOME LATIN-AMERICAN EXPERIENCES CONCERNING TEACHING OF CHEMICAL METROLOGY

Some acquired experiences concerning the teaching of Chemical Metrology in Latin-America for almost fifteen years are presented. They include postgraduate and undergraduate activities developed in seven countries of this continent. The combination of theoretic and practical activities and the sequence of learning from metrological, statistical and chemometrical backgrounds up to practical activities in personal computers are basic and motivate the learning process. Care is taken in order to promote the metrological approach and thinking in Analytical Chemistry. The learning of computing techniques plays an important role, combining graphic and numerical techniques for data analysis. The role of examples during the teaching process is analyzed and recognized. The introduction of a general model of errors permits to approach different topics on a metrological basis. Similarly, linking of performance characteristics of analytical procedures and validation concepts is essential. The understanding of traceability prepares students for organizational actions. Proper understanding of interlaboratory studies is attained on a practical basis. The metrological approach of uncertainty based on the Theory of Errors permits to develop the topic. A better comprehension of written standards is obtained from practical examples. Undergraduate students acquire a basic metrological knowledge very well. Recommendations for undergraduate and postgraduate programs are pointed out.

Damir Ilic, Josip Butorac, Mladen Boršic, Roman Malaric
HOW TO TEACH THE PHYSICAL AND TECHNICAL ASPECTS OF METROLOGY?

According to the recognized elements of General and Applied Metrology, the curriculum of courses covering the field of Electrical Engineering and Computing are presented, for the study programs adapted to the Bologna declaration at the Faculty of Electrical Engineering and Computing in Zagreb, Croatia. The criteria for teaching the metrology are recognized, and the basic approach to the measurement is pointed out. Some aspects from our experience and point of view are presented for the exchange of knowledge and attitudes within the metrologists.

Drago Cmuk, Tarik Mutapcic, Francesco Zoino
REMOTE VERSUS CLASSICAL LABORATORY IN ELECTRONIC MEASUREMENTS TEACHING - EFFECTIVENESS TESTING

Considering importance of practical experience as a crucial step in effective transfer of knowledge to learner in electric measurements and other technical fields, paper caries out research results of effectiveness testing on remote laboratory developed at University of Sannio, Italy. Although remote laboratories are spreading among universities and educational institutions very fast because of their advantages in setup, price and accessibility actual effectiveness of this laboratories comparing to classical is still unknown. Two groups of students of the electric and electronic measurement courses have been chosen to test the effectiveness of remote laboratory comparing to classical one through specially designed experiment. They were executing both, hands-on and remote experiment. Obtained examination results and the learning process of those students have been analyzed and compared with those obtained by group of students of traditional teaching. Some surveys has also be carried out in order to obtain a feedback on effective usability, benefits and helpfulness of the remote measurement laboratory, but also it’s weakness and issues to be improved or investigated in the future.

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