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Andrej Predin, Ignacijo Biluš, Mitja Kastrevc, Roman Klasinc
MEASURING SYSTEM FOR RIVER BED AND WATER SURFACE MAPPING

This contribution presents a measuring system model (up to 5 m crossing distance) for river bed and water surface mapping. The basic parameters of the system are given together with principles of driving/controlling and measuring data processing.

Jean Mailhé, Jean-Marc Linares, Jean-Michel Sprauel
VERIFICATION BY VIRTUAL GAUGE USING A STATISTICAL CRITERION

For the most part, metrology software is currently based on the measurement of distances or angles between geometrical elements. If this method of verification is well adapted to geometrical specification without a virtual state modifier, this is not appropriate for specification based on envelop zone such as in maximal matter condition, for example, for the ISO2692 standard. Usually the least squares best fit method is used to estimate derived surfaces, but the statistical information contained in the acquired coordinates remains under-used. The aim of this paper is to present a new approach for the verification of a part, based on a virtual gauge and using a statistical criterion.

Alexandre Titov, Igor Malinovsky
HIGH-PRECISION TEMPERATURE MEASUREMENTS OF MATERIAL ARTIFACTS

Important advances in temperature measurements of material artifacts are reported as a result of a new approach in high-precision calibration of thermometers, which is free from contribution of temperature gradients in the calibration system and velocity error, associated with time delays due to propagation of heat waves in artifacts.

Han-Young Ryu, Won-Kyu Lee, Han-Seb Moon, Chu-Shik Kang, Ho-Suhng Suh
A NOVEL DILATOMETER FOR MEASURING COEFFICIENT OF THERMAL EXPANSION OF ULE-MATERIAL USING A FIBER RING LASER

A new type of measuring system for coefficient of linear thermal expansion (CTE) of ULE (Ultra Low Expansion) material by using a fiber ring laser is introduced in this paper. The lasing frequency of the laser is stabilized to one of the transmission peaks of the etalon filter by controlling the resonant frequency of the tunable filter. The spacer of the (Fabry-Perot type) etalon filter is made of ULE material.
We could measure the CTE of ULE by measuring the optical frequency change caused by the temperature change of the etalon spacer. The combined standard uncertainty is estimated as the value of 3.66 · 10-8.

Miroslaw Grzelka, Bartosz Gapinski
RECOMMENDATIONS ON THE MEASUREMENT OF CYLINDRICAL GEARS WITH COORDINATE MEASURING MACHINES

The accurate metrological analysis of the proposed measuring software enables to determine the errors of gears measurement with CMM, as well as to formulate recommendations on the chiose of the appropriate CMM with known uncertainty for the metrological task of gear measurement, where the gear is manufactured in certain accuracy class. Criterion of the metrological correctness allows that the final error would not exceed 10% of tolerance (or in some cases 20% of tolerance). In order to perform full metrological analysis of the measuring software accuracy it is needed to carry out several simulations that would enable to determine particular errors and their influence on the final measuring result.

G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann
NANOMEASURING AND NANOPOSITIONING ENGINEERING

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPMMachine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany.
The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

R. Füßl, G. Jäger, R. Grünwald, I. Schmidt
A NEW VECTORIAL MODEL FOR THE ESTIMATION OF UNCERTAINTY IN NANO COORDINATE

Nano coordinate measuring machines (NCMMs) are technological devices enabling the positioning, touching and measuring of centimetre-sized objects with nanometre precision. When using such measuring machines the specification of measurement results requires the expression of uncertainty of measurement. This paper describes a concept for the expression of three- dimensional uncertainty of NCMMs based on a vectorial metrological model. By means of a modular model approach submodels can be easily included in the metrological main model. Furthermore, cross-coupling effects arising between the measuring axes can be taken into account. The described model provides a basis for the expression of uncertainty according to the Guide to the Expression of Uncertainty in Measurement (GUM) or by means of the Monte- Carlo-Method. The results of the uncertainty analysis are shown for a special example of a vectorial model.

Albert Weckenmann, Thomas Wiedenhoefer
MODULARIZED MODELING OF MEASUREMENT PROCESSES IN MICRO- AND NANOMETROLOGY FOR MEASUREMENT UNCERTAINTY EVALUATION

Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.

Albert Weckenmann, Jörg Hoffmann
CONSTRUCTION AND EVALUATION OF A TRACEABLE METROLOGICAL LONG RANGE SCANNING TUNNELING MICROSCOPE

Based on a commercial laser interferometrically controlled long-range nanopositioning unit a traceable metrological STM with a range of 25 mm · 25 mm · 5 mm and a resolution up to 0.1 nm has been designed, set-up and tested. Design objectives of the custom made STM probing system were low noise and high thermal and mechanical stability to enable for time consuming large area scans.
As the nanopositioning stage is capable of traceable position measurement the probing system is used in compensation method, i.e. minimizing the effective measuring range of the sensor so that the length measured untraceably by the sensor is negligible compared to the lengths measured traceably by the interferometers.

Michael Balke, Erwin Peiner, Lutz Doering
CANTILEVER STRUCTURES FOR MEASURING MICROSTRUCTURED SURFACES OF MACRO AND MICRO COMPONENTS

In this paper we present a new type of silicon micro cantilever structures with integrated tips for measuring microstructured surfaces. Results of FEM simulation and calibration results will be discussed. Also the fabrication of the structures and the fabrication of the tips are described.

Page 846 of 936 Results 8451 - 8460 of 9356