Miroslaw Grzelka, Bartosz Gapinski
The accurate metrological analysis of the proposed measuring software enables to determine the errors of gears measurement with CMM, as well as to formulate recommendations on the chiose of the appropriate CMM with known uncertainty for the metrological task of gear measurement, where the gear is manufactured in certain accuracy class. Criterion of the metrological correctness allows that the final error would not exceed 10% of tolerance (or in some cases 20% of tolerance). In order to perform full metrological analysis of the measuring software accuracy it is needed to carry out several...
XVIII IMEKO World Congress
· TC14
· 2006
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G. Jäger, T. Hausotte, E. Manske, H.-J. Büchner, R. Mastylo, N. Dorozhovets, N. Hofmann
The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPMMachine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by...
XVIII IMEKO World Congress
· TC14
· 2006
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R. Füßl, G. Jäger, R. Grünwald, I. Schmidt
Nano coordinate measuring machines (NCMMs) are technological devices enabling the positioning, touching and measuring of centimetre-sized objects with nanometre precision. When using such measuring machines the specification of measurement results requires the expression of uncertainty of measurement. This paper describes a concept for the expression of three- dimensional uncertainty of NCMMs based on a vectorial metrological model. By means of a modular model approach submodels can be easily included in the metrological main model. Furthermore, cross-coupling effects arising between the...
XVIII IMEKO World Congress
· TC14
· 2006
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Albert Weckenmann, Thomas Wiedenhoefer
Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.
XVIII IMEKO World Congress
· TC14
· 2006
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Albert Weckenmann, Jörg Hoffmann
Based on a commercial laser interferometrically controlled long-range nanopositioning unit a traceable metrological STM with a range of 25 mm · 25 mm · 5 mm and a resolution up to 0.1 nm has been designed, set-up and tested. Design objectives of the custom made STM probing system were low noise and high thermal and mechanical stability to enable for time consuming large area scans. As the nanopositioning stage is capable of traceable position measurement the probing system is used in compensation method, i.e. minimizing the effective measuring range of the sensor so that the length measured...
XVIII IMEKO World Congress
· TC14
· 2006
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Michael Balke, Erwin Peiner, Lutz Doering
In this paper we present a new type of silicon micro cantilever structures with integrated tips for measuring microstructured surfaces. Results of FEM simulation and calibration results will be discussed. Also the fabrication of the structures and the fabrication of the tips are described.
XVIII IMEKO World Congress
· TC14
· 2006
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Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji
Nanometric lateral scales with 25 nm pitch using GaAs/InGaP superlattice were designed and fabricated for realization of the-smallest-pitch-CRMs. The pitch of the scales was measured by a nanometrological AFM and uncertainty in pitch measurements was evaluated. The quality of the developed scales as CRMs was verified.
XVIII IMEKO World Congress
· TC14
· 2006
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Cristian Fosalau, Emil Vremera, Marinel Temneanu, Mihai Cretu
The paper goal is to describe the way in which the Giant Magnetoimpedance Effect (GMI) occurring in the magnetic amorphous wires can be utilized to detect small rotational movements. The operation principle is based on modification of the wire impedance under action of a torsional stress when an ac low current flows through it. The schematic overview of an angle sensor built around this effect, along with some experimental results obtained upon the functional model are presented in the paper. Analysis was performed on the sensor behavior under different frequencies and intensities of the...
XVIII IMEKO World Congress
· TC14
· 2006
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Dariusz Janecki, Stanisław Adamczak, Marek Cabaj
In the paper "A new approach to the examination of the displacement sensor characteristics" published in Measurement, vol. 28, pp. 261-267, sebrowska-Lucyk proposes a new, interesting method for measuring the characteristics of displacement sensors. The method consist in exciting the sensor tip with a sinusoidal signal having a known amplitude. In this paper, the authors modify the method so that it is possible: (1) to conduct measurements by means of a typical sensor tip with a circular crosssection, (2) to eliminate the necessity of possessing an additional measuring eccentricity standard,...
XVIII IMEKO World Congress
· TC14
· 2006
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Antonio Piratelli-Filho, Geraldo G. Soares-Neto
The main purpose of this work is to investigate the errors on secondary surfaces generated to joint free form surfaces of complex parts measured with Coordinate Measuring Machines (CMM) and modeled with CAD techniques. The approach involves the measurement of a complex part and fitting using NURBS curves and surfaces. The errors were determined by difference between determined points on secondary surfaces and fitted CAD surface.
XVIII IMEKO World Congress
· TC14
· 2006
· Download