A. Schiavi, A. Prato, F. Mazzoleni, A. Facello, A. Kwitonda
METROLOGICAL CHARACTERIZATION OF DIGITAL MEMS ACCELEROMETERS IN DYNAMIC CONDITIONS: AN INVESTIGATION OF LINEARITY IN AMPLITUDE AND TEMPERATURE EFFECTS
In several applications, such as industrial plants monitoring, or peculiar manufacturing process, the sensors are subjected to a wide range of acceleration amplitude levels or shocks, as well as thermal changes, that could affect the micro electro-mechanical inner parts, altering their performance and reliability. In this work, by applying a calibration procedure developed at INRIM, the main sensitivity of digital MEMS accelerometers is evaluated, as a function of amplitude, in the frequency domain. Moreover, a survey of temperature drift, from -20 °C up to 80 °C, is also performed, to characterize the suitability of digital MEMS accelerometers for actual applications.