Ryota Kudo, Kohei Okuda, Kenya Okita, Yusuke Tokuta, Shun Nakatani, Motohiro Nakano, Kazuya Yamamura, Katsuyoshi Endo
SELF-CALIBRATION FOR OPTICAL PATH LENGTH OF 3D NANOPROFILER CONSIDERING RANDOM ERROR
In 3D nanoprofiler we develop, the optical path length is the largest uncertainty factor. As a method for self-calibration of the optical path length, we propose a method of utilizing a known optical path length shift. Results of simulation considering the random error, the accuracy was found to be dependent on 3 parameters. Similar characteristics is confirmed by experiment. Optical path length has been determined by the order of under four digits.