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Dan Mihai Ştefănescu
THE ‘SI’ QUANTITIES AND UNITS – A UNIVERSAL LANGUAGE BRIDGING OVER THE 24 IMEKO TECHNICAL COMMITTEES

SI quantities and units are the subject to various IMEKO technical committees, not assigned to a certain TC (e.g. time). On the horizon of the adoption of a new SI, the connection between quantities and units remains the same, and their complexity is noticeable in the three graphical representations given (tree, planetary and subway map), reflecting the significance of the Chinese proverb that a suggestive picture values more than a thousand of words.

Karl H. Ruhm
MEASUREMENT PLUS OBSERVATION - A MODERN STRUCTURE OF METROLOGY

Diverse fields of Metrology reveal manifold perceptions concerning the meaning of the classical procedure «measurement» and of the trendy procedure «observation». No common consensus has become visible so far. The following systematic investigations of metrological tasks and structures develop and propose a self-evident definition of both procedures and the resulting analytical relationship. This is feasible by modelling and visualising dynamic subsystems by means of Signal and System Theory. In particular, one can consistently demonstrate and justify the complementary tasks of measurement and observation. Thus, we gain an extended and modern version of basic metrological structures.

Philippe Richard
THE REDEFINITION OF THE SI IN 2018 AND THE PRESENT STATUS FOR THE KILOGRAM

The 25th General Conference on Weights and Measures (CGPM) adopted its Resolution 1 "On the future revision of the SI". According to this Resolution, new definitions for the kilogram, the ampere, the kelvin and the mole will be based on fixed numerical values of selected constants. The Consultative Committee for Mass and Related Quantities (CCM) and the Consultative Committee for Units (CCU) established a joint roadmap in order to ensure that all necessary steps are completed in time for the 26th CGPM in 2018. The paper present these steps and reviews the situation with the criteria proposed by the CCM in the light of the recent progress and published results.

Andreas Kamcke
UNCERTAINTIES CAUSED BY HUMAN FACTORS - CAN AN EMOTION DETECTOR HELP?

Uncertainties in results caused by human factors of test persons are well known in the area of testing the speech quality of telephone connections. The presence of this kind of uncertainty components were already known when this test methodology was introduced. For elimination or reduction a new approach by using emotion detection is presented. First results and limits are given. In order to get a universal method standardization is urgently needed.

Frank Härtig, Horst Bettin, Michael Borys, Rudolf Meeß, Roman Schwartz
DISSEMINATION OF THE NEW KILOGRAM VIA SILICON SPHERES

The Physikalisch-Technische Bundesanstalt (PTB) is currently elaborating a concept for the maintenance and dissemination of the SI unit kilogram on the basis of silicon spheres. For this purpose, handling procedures and work instructions are elaborated. These contain, for example, the cleaning procedures of the spheres, the safe transport and storage as well as procedures for the monitoring of the growth of oxide on the sphere surface. Realisation of the redefined kilogram by means of 28Si spheres and natSiqp spheres as primary respectively "quasi primary" mass measurement standards and disseminated with industrially manufactured natSisc spheres as secondary mass measurement standards. The described procedures are to be developed in cooperation with European National Metrology Institutes (NMIs) and Destignated Institutes (DIs).

Joachim Fischer
THE NEW KELVIN

The General Conference on Weights and Measures agreed in principle at its 24th meeting in October 2011 on new definitions for four of the seven base units of the International System of Units (SI). Kilogram, ampere, kelvin, and mole will be defined in terms of fixed numerical values of the Planck constant, elementary charge, Boltzmann constant, and Avogadro constant, respectively.
A refined value of the Boltzmann constant suitable for defining the kelvin is presently determined by fundamentally different primary methods like acoustic gas thermometry, dielectric constant gas thermometry, noise thermometry, and the Doppler broadening technique. Details of the measurements, progress to date, and further perspectives will be reported.
Necessary conditions to be met before proceeding with changing the definition are given. The consequences of the new definition of the kelvin on temperature measurement will be outlined. After the new definition has been adopted as well the present method, the International Temperature Scale of 1990, ITS-90 and primary thermometers can be both used to realize the temperature unit. Both methods to realize the kelvin will be reviewed in this presentation.

Teresa Werner, Fengzhou Fang
EMPIRICAL ANALYSIS OF MEASUREMENT UNCERTAINTY FOR THE INSPECTION OF MICRO-FEATURES USING A CONFOCAL MICROSCOPE

While for measurements on the macro-scale the applied measurement systems and typical influences are generally well understood, this does not hold true for measurements on the micro-scale. This limited knowledge results in a rather high value of measurement uncertainty. Thus, to support a suitable analysis of measurement uncertainty and at the same time enable a targeted improvement of the implemented measurement strategy, an empirical method for the determination of measurement uncertainty based on a systematic approach for system analysis is proposed.
On the example of inspecting parts with micro-features by a confocal microscope, a strategy has been developed to identify and quantify relevant influence factors on the measurement result, applying methods of Design of Experiments (DoE). By statistical evaluation of the results gathered there, an empirical description of the measurement system was synthesized. Major influence factors have been described and the influence of several options for the measurement strategy on the reliability of the measurement results have been quantified.
Based on this characterization, a value for measurement uncertainty was determined. Also, recommendations for ideal conditions of the measurement and the applied strategy have been derived. By applying such findings to the actual performance of measurements as well as to the according uncertainty budget, the overall uncertainty of the measurement results can be effectively reduced. Thus, an experimental strategy for the analysis of measurement uncertainty can at the same time support the determination of a realistic value for measurement uncertainty and the improvement of applied measurement strategies.

Takashi Yagi
DEVELOPMENT OF THERMAL DIFFUSIVITY STANDARD FOR THIN FILMS: REFERENCE THIN FILM AND MEASUREMENT METHOD

The reference thin metal film to calibrate for the thermal diffusivity is being developed in NMIJ. Mo thin film with a nominal thickness of 400 nm is candidate for the reference film. To inspect the fabrication process of the reference material, test films were prepared and estimated in terms of scatter of the physical properties. Thermal diffusivity of those films were measured using the pulsed light heating thermoreflectance apparatus originally developed by NMIJ. The measured thermal diffusivity is 3.46 × 10-5 m² s-1 and the standard deviation is 0.05 × 10-5 m² s-1 (1.6%) for 8 films sampled from a total of 75 films. We plan to supply the reference thin films based on above mentioned technology in 2014FY.

Yu. V. Chugui, E. S. Senchenko
3D IMAGE FORMATION IN TRANSMITTED PARTIALLY COHERENT AND INCOHERENT LIGHT APPLIED TO DIMENSIONAL INSPECTION

The peculiarities of 3D objects image formation with clear shadow projection under their illumination by partially coherent and perfectly incoherent light based on the constructive theory of 3D objects formation are investigated. Threshold algorithms for determining the position of 3D object geometric boundary, taking into account its thickness, the light source angular size and the projection system angular aperture are developed. These algorithms are based on the application of true (calculated) threshold or standard one using the corrective component for threshold. The cases of weak and strong 3D object volumetricity for partially coherent and incoherent illumination are studied. The analytical equations for these algorithms are given. It has been shown that their use can significantly improve the measurement accuracy of extended objects.

Sheng-Jui Chen, Sheau-Shi Pan
DESIGN AND CALIBRATION OF A SUB-NM RESOLUTION DIFFERENTIAL CAPACITIVE POSITION SENSOR

This paper introduces the design and calibration of a capacitive position sensor used for measuring the mechanical deflection of a beam with sub-nanometer resolution. It is known that the most accurate and SI traceable method for displacement measurement is the laser interferometry. However, in our application we need to know not only the displacement of the object under measurement but also its distance to a reference origin. To measure the distance with a common two-beam interferometer, in which the measured displacement is proportional to the number of fringes counted, one needs to move the object from the reference origin to the desired position and continuously track the readout of the laser interferometer. To meet this need, we have developed a capacitive position sensor dedicated to this application. The capacitive sensor consists of three planar electrodes, i.e. two stationary electrodes and one movable electrode attached to the beam under measurement. The position sensing is based on differential capacitance detection and realized by a capacitive-inductive bridge circuit. We present the design and working principle of this sensing circuit. The performance of the capacitive position sensor was evaluated by calibrating it against a laser interferometer. The calibration also supplies the lack of SI traceability of the capacitive sensor. The calibration results show that the capacitive position sensor is able to measure position with sub-nanometer resolution. The sensing coefficient of the capacitive position sensor was found to be (14.0 ± 0.1) mV/nm.

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