The calibration of the stylus type surface texture measuring instruments is usually carried out using a precision reference specimen of regular or random pattern of irregularities. These precision specimens are produced with hardened surfaces in order to minimize the scratching effect of the stylus on their certified values. The continual tracing on these surfaces is expected to deteriorate their quality. An experimental investigation on one of these specimens having a sinusoidal pattern of irregularity has been carried out. The specimen was traced several times on exactly the same position. Up to 350 traces were taken. Form each trace a calibration constant for the measuring instrument was computed. Sets of three consecutive traces were taken and the average calibration constants obtained form each set was computed. The behavior of the results was studied, where it has been found that the mean values of the calibration constants continually decrease. After tracing the specimen for about 250 times a loss of more than 6% of its original value was obtained. The plots of the results as well as photographs of the scratches, taken using the Scanning Electron Microscope (SEM), are given.

In the paper the authors presented a comparison analysis of three different probes used for surface topography measurement. Skid and skidless stylus probes were used as contact pick-ups, while an optical autofocussing pick-up was applied as a non-contact one. The analysis was performed using several different topography parameters. It showed that a skid causes some relatively small distortions as far as the surface representation is concerned. The optical probe on the other hand proved to be a very difficult measuring tool, particularly for surfaces with steep slopes and sharp edges. Yet even for very smooth surfaces a great attention must be paid while measuring with this kind of pick-up is considered.

The aim of a high precision measurement room is to minimize most of the disturbing influences on the measuring devices installed in the measurement room by structural organization. The goal of scientific research in the field of manufacturing metrology is in particular the improvement of the measurement accuracy in the micro- and sub-micrometer range with simultaneously desired automation of the measurement procedures. In each case, reliable results must be obtained according to the internationally defined units for the success of the research work and for the acknowledgement of the results in the professional world. This is only possible under most extensive exclusion of the disturbing environmental influences in a measurement room of highest grade, which is particularly shielded and kept at constant temperature.

For the past four years, a group of international experts in the International Organization for Standardization (ISO) has been working on a series of standards for geometrical filters. This effort was motivated by an urgent need in industry to define the terms, concepts, and techniques involved in reducing raw data collected by measurements for proper interpretation while inspecting manufactured parts to verify whether they meet their tolerance specifications. This paper describes the efforts of this ISO group and what has been accomplished thus far.

We report on simple high-sensitivity interferometric technique of detecting vibrations and present characteristics of laser vibrometer using GaAs and SnS₂ adaptive photodetectors based on the effect of the non-steady-state photoelectromotive force. It enables efficient direct conversion of high-frequency phase modulation of speckle-like optical wave reflected from the vibrating object into an output electrical signal with concomitant setting of optimal operation point of the interferometer and suppression of amplitude laser noise. The results of measurements of small vibration amplitudes of the mirror and diffusely scattering objects are presented. Preliminary studies at 1.06 µm showed that it is possible to detect ultrasonic vibrations with the amplitude of 0.2 Å with a signal power of 20 mW and a bandwidth of 15.5 MHz. This optical phase-to-electrical signal converter is not sensitive to ambient vibrations, thermal drift, amplitude laser noise and is therefore appropriated for industrial applications.